New Invention Profile
| Publication No: | IN202311006418 [India] | Application No: | IN202311006418 |
| Title: | A three degrees of freedom (3DOFs) precision positioning Wedge Air Bearing Stage System (WABSS) | ||
| Publication Date: | 02-08-2024 | File Date: | 31-01-2023 |
| Inventor(s): | Samik Dutta; Abhijit Mahapatra; Kornel F Ehmann | ||
| IPC Classification: | B23Q 1/56 | ||
| Abstract: | The present invention provides a three degrees of freedom (3DoFs) Wedge Air Bearing Translational Stage System (WABSS) for positioning of miniature components using a parallel kinematic mechanism. The system is having three kinematic sub-chains situated at 120o apart from each other, where each sub-chain has one prismatic joint and one planar joint guided by air bearings. One central stage assembly (CSA) having three wedges with wedge planes oriented 45? to the horizontal plane is capable of translations along the X-, Y- and Z-axes for precision positioning of the targeted workpiece material held on the CSA. Following the parallel kinematic principle, the coordinated translations of the three slide bars produce 3DoFs translations to position CSA in each sub-chain. The linear geometric error along the Z-axis is independent from the angular tolerances due to its unique vertical structure. Three embedded plane mirrors to CSA are useful for Abbe error free measurement of positioning, using three laser interferometers. FIG.:-1 |
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| Startup Options: | Advantages of the present invention are: It is a high precision positioning parallel kinematic system with high stiffness and low cumulative errors. It has air bearing based three planar joints (P1, P2 and P3) with magnetic preloading and three prismatic joints (T1, T2 and T3) with ironless linear motors to ensure a frictionless direct drive system for motion without cogging to achieve high control bandwidth. It has a unique vertical structural topology, where actuation takes place in the Z-axis direction and the linear geometric error of the CSA (I) along the Z-axis is independent of the angular tolerances or orientation errors. The linear error along the Z-axis is equal to the error in the Z-axis actuation only. It is compact due symmetricity and its small foot-print area, leading to minimization of the system’s dimensions that reduces thermal and geometric errors. It has a pneumatic counterbalance in each of the prismatic joints to ensure the compensation of gravity with high load to weight ratio, quick settling and protection from sudden power off situation. Abbe error free design due to the position of the three plane mirrors used for further kinematic calibration with laser beam interferometers. The motor cables, encoder signal cables and pipes for air flow to linear air bearings and pneumatic counterbalance are stationary due to its unique design. Therefore, complex cable management system is not required for its operation. The design of the system is completely modular, so that any part can be repaired or serviced with very ease in disassembly or assembly, as per requirement. |
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: director[at]cmeri[dot]res[dot]in
:91-343-2546401, 6510701
:https://www.cmeri.res.in
Industrial Applications
Engine and Motors [Mechanical]
Instrumentation, Appliances, Devices Applications [Instrumentation, Appliances, Devices]