Mercury-free Vacuum Ultraviolet (VUV-172nm) Excimer Lamp for Surface Activation and Modifications

The global excimer UV lamp market is growing due to rising demand in semiconductors, medical sterilization, optics, and surface modification. Limited global suppliers, such as Osram Germany and Ushio Japan/USA, make indigenous excimer sources a cost-effective alternative. 

The non-thermal, high-energy photon radiation at 172nm effectively breaks molecular bonds and restructures surfaces without thermal damage. This technology is instrumental in ozone generation, enhancing hydrophilicity of the surfaces, improving surface wettability, and removing organic contaminants, thereby finding widespread applications in semiconductor processing, optics, and advanced material manufacturing. 

APPLICATION SECTOR: high-performance UV treatment solutions

• Mercury Free
• Extremely energetic VUV photon forming reactive radicals suitable for surface functionalisation and activation.
• Absolute VUV power of up to ~ 15 mw/cm2 (172nm). 
• Design flexibility for custom development.